Investigation of Thin Films MgAl2O4, Deposited on the Si Substrates by Vacuum Thermal Evaporation
( Pp. 125-131)
Stanchik Aliona V.
Gremenok Valery F.
Trukhanova Ekaterina L.
Khoroshko Vital V.
Suleymanov Sultan X.
Dyskin Valery G.
Djanklich Mustafa U.
Kulagina Natalya A.
Amirov Shakhboz Yo. ugli
More about authors
Stanchik Aliona V.
Cand. Sci. (Phys.-Math.); senior researcher at the Laboratory of Semiconductor Physics
State Scientific and Production Association “Scientific-Practical Materials Research Centre of the National Academy of Sciences of Belarus”
Minsk, Republic of Belarus Gremenok Valery F. Dr. Sci. (Phys.-Math.); Head at the Laboratory of Semiconductor Physics
State Scientific and Production Association “Scientific-Practical Materials Research Centre of the National Academy of Sciences of Belarus”
Minsk, Republic of Belarus Trukhanova Ekaterina L. Cand. Sci. (Phys.-Math.); senior researcher at the Laboratory of Technology and Physics of Crystal Growth
State Scientific and Production Association “Scientific-Practical Materials Research Centre of the National Academy of Sciences of Belarus”
Minsk, Republic of Belarus Khoroshko Vital V. Cand. Sci. (Eng.); Head at the Department of Information and Computer Systems Design
Belarusian State University of Informatics and Radioelectronics
Minsk, Republic of Belarus Suleymanov Sultan X. Cand. Sci. (Phys.-Math.); Head at the Laboratory of High-Temperature Composite Materials and Coatings
Institute of Materials Science of the SPA “Physics-Sun” of the Academy of Sciences of the Republic of Uzbekistan
Tashkent, Uzbekistan Dyskin Valery G. Dr. Sci. (Philos.); senior researcher
Institute of Material Science of the Scientific-Production Association “Physics-Sun” of the Academy of Sciences of the Republic of Uzbekistan
Tashkent, Republic of Uzbekistan Djanklich Mustafa U. Cand. Sci. (Eng.); senior research at the Laboratory of High-Temperature Composite Materials and Coatings
Institute of Materials Science of the SPA “Physics-Sun” of the Academy of Sciences of the Republic of Uzbekistan
Tashkent, Uzbekistan Kulagina Natalya A. research at the Laboratory of High-Temperature Composite Materials and Coatings
Institute of Materials Science of the SPA “Physics-Sun” of the Academy of Sciences of the Republic of Uzbekistan
Tashkent, Uzbekistan Amirov Shakhboz Yo. ugli research at the Laboratory of High-Temperature Composite Materials and Coatings
Institute of Materials Science of the SPA “Physics-Sun” of the Academy of Sciences of the Republic of Uzbekistan
Tashkent, Uzbekistan
State Scientific and Production Association “Scientific-Practical Materials Research Centre of the National Academy of Sciences of Belarus”
Minsk, Republic of Belarus Gremenok Valery F. Dr. Sci. (Phys.-Math.); Head at the Laboratory of Semiconductor Physics
State Scientific and Production Association “Scientific-Practical Materials Research Centre of the National Academy of Sciences of Belarus”
Minsk, Republic of Belarus Trukhanova Ekaterina L. Cand. Sci. (Phys.-Math.); senior researcher at the Laboratory of Technology and Physics of Crystal Growth
State Scientific and Production Association “Scientific-Practical Materials Research Centre of the National Academy of Sciences of Belarus”
Minsk, Republic of Belarus Khoroshko Vital V. Cand. Sci. (Eng.); Head at the Department of Information and Computer Systems Design
Belarusian State University of Informatics and Radioelectronics
Minsk, Republic of Belarus Suleymanov Sultan X. Cand. Sci. (Phys.-Math.); Head at the Laboratory of High-Temperature Composite Materials and Coatings
Institute of Materials Science of the SPA “Physics-Sun” of the Academy of Sciences of the Republic of Uzbekistan
Tashkent, Uzbekistan Dyskin Valery G. Dr. Sci. (Philos.); senior researcher
Institute of Material Science of the Scientific-Production Association “Physics-Sun” of the Academy of Sciences of the Republic of Uzbekistan
Tashkent, Republic of Uzbekistan Djanklich Mustafa U. Cand. Sci. (Eng.); senior research at the Laboratory of High-Temperature Composite Materials and Coatings
Institute of Materials Science of the SPA “Physics-Sun” of the Academy of Sciences of the Republic of Uzbekistan
Tashkent, Uzbekistan Kulagina Natalya A. research at the Laboratory of High-Temperature Composite Materials and Coatings
Institute of Materials Science of the SPA “Physics-Sun” of the Academy of Sciences of the Republic of Uzbekistan
Tashkent, Uzbekistan Amirov Shakhboz Yo. ugli research at the Laboratory of High-Temperature Composite Materials and Coatings
Institute of Materials Science of the SPA “Physics-Sun” of the Academy of Sciences of the Republic of Uzbekistan
Tashkent, Uzbekistan
Abstract:
The article presents data on the study of X-ray structural and microstructural characteristics of thin films of aluminum-magnesium spinel MgAl2O4 deposited on Si substrates by vacuum thermal evaporation. MgAl2O4 films have a polycrystalline rhombic structure. The values of the unit cell parameters of MgAl2O4 are calculated. Scanning electron and atomic force microscopy showed that MgAl2O4 films have a densely packed structure without cracks. Physical characteristics and good adhesion of MgAl2O4 thin films to silicon substrates indicate their possibility of using in devices of opto- and microelectronics.
How to Cite:
Stanchik A.V., Gremenok V.F., Trukhanova E.L., Khoroshko V.V., Suleymanov S.X., Dyskin V.G., Djanklich M.U., Kulagina N.A., Amirov S.Y., (2022), INVESTIGATION OF THIN FILMS MGAL2O4, DEPOSITED ON THE SI SUBSTRATES BY VACUUM THERMAL EVAPORATION. Computational Nanotechnology, 1 => 125-131.
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Funamori N., Jeanloz R., Nguyen J.H. et al. High-pressure transformations in MgAl2O4 // Journal of Geophysical Research Atmospheres. 1998. Vol. 103. Pp. 20813-20818.
Catti M. High-pressure stability, structure and compressibility of Cmcm-MgAl2O4: An ab initio study // Phys. Chem. Minerals. 2001. Vol. 28. Issue 10. Pp. 729-736.
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Henry J., Mohanraj K., Sivakumar G. Photoelectrochemical cell performances of Cu2ZnSnSe4 thin films deposited on various conductive substrates // Vacuum. 2018. Vol. 156. Pp. 172-180.
Kachaev A.A., Grashchenkov D.V., Lebedeva Yu.E. Optically transparent ceramics (review). Glass and Ceramics. 2016. No. 4. Pp. 3-10. (In Rus.)
Ji-Guang L., Ikegami T., Jong-Heum L. et al. Fabrication of Translucent Magnesium Aluminum Spinel Ceramics // J. Am. Ceram. Soc. 2000. Vol. 83. No. 11. Pp. 2866-2868.
Ganesh I. A review on magnesium aluminate (MgAl2O4) spinel: Synthesis, processing and applications // International Materials Reviews. 2013. Vol. 58. No. 2. Pp. 63-112.
Senina M.O., Lemeshev D.O. Methods for the synthesis of aluminum-magnesium spinel powders for obtaining optically transparent ceramics (review). Advances in Chemistry and Chemical Technology. 2016. Vol. 30. No. 7. Pp. 101-103. (In Rus.)
Redfern S.A.T., Harrison R.J., O Neill H.St.C. et al. Thermodynamics and kinetics of cation ordering in MgAl2O4 spinel up to 1600 C from in situ neutron diffraction // Amer. Mineral. 1999. Vol. 84. No. 3. Pp. 299-310.
Sampath S.K., Kanhere D.J., Pandey R. Electronic structure of spinel oxides: Zinc aluminate and zinc gallate // J. Phys. Condens. Matter. 1999. Vol. 11. Pp. 3635-3644.
Surendran K.P., Bijumon P.V., Mohanan P. et al. (1-x)MgAl2O4-xTiO2 dielectrics for microwave and millimeter wave applications // Appl. Phys. A. 2005. Vol. 81. No. 4. Pp. 823-826.
Valanarasu S., Dhanasekaran V., Karunakaran M. et al. Optical and microstructural properties of sol-gel spin coated MgAl2O4 thin films // Digest Journal of Nanomaterials and Biostructures. 2015. Vol. 10. No. 2. Pp. 643-654.
Ahmad S.M., Hussain T., Ahmad R. et al. Synthesis and characterization of magnesium aluminate (MgAl2O4) spinel (MAS) thin films // Mater. Res. Express. 2018. Vol. 5. Pp. 016415 (1-9).
Hsu C.H., Lin J.S., Yang H.W. Fabrication and characterization of MgAl2O4 thin films by sol-gel method // Advanced Materials Research. 2011. Vol. 216. Pp. 514-517.
Cabello G., Lillo L., Caro C. et al. A photochemical proposal for the preparation of ZnAl2O4 and MgAl2O4 thin films from -diketonate complex precursors // Materials Research Bulletin. 2016. Vol. 77. Pp. 212-220.
Siby K., Shajo S., Jose M. et al. Structural and electrical properties of nano-sized magnesium aluminate // Indian Journal of Pure and Applied Physics. 2004. Vol. 42. No. 12. Pp. 926-933.
Radishevskaya N.I., Nazarova A.Yu., Lvov O.V. et al. Synthesis of magnesium aluminate spinel in the MgO-Al2O3-Al system using the SHS method // Journal of Physics: Conf. Series. 2019. Vol. 1214. Pp. 012019 (1-6).
Liu L. Disproportionation of MgAl2O4 spinel at high pressures and temperatures // Geophysical Research Letters. 1975. Vol. 2. No. 1. Pp. 9-11.
Liu L. A new high-pressure phase of spinel // Earth and Planetary Science Letters. 1978. Vol. 41. № 4. Pp. 398-404.
Reid A.F., Ringwood A.E. Newly observed high pressure transformations in Mn3O4, CaAl2O4, and ZrSiO4 // Earth and Planetary Science Letters. 1969. Vol. 6. No. 3. Pp. 205-211.
Irifune T., Fujino K., Ohtani E. A new high-pressure form of MgAl2O4 // Nature. 1991. Vol. 349. Issue 6308. Pp. 409-411.
Funamori N., Jeanloz R., Nguyen J.H. et al. High-pressure transformations in MgAl2O4 // Journal of Geophysical Research Atmospheres. 1998. Vol. 103. Pp. 20813-20818.
Catti M. High-pressure stability, structure and compressibility of Cmcm-MgAl2O4: An ab initio study // Phys. Chem. Minerals. 2001. Vol. 28. Issue 10. Pp. 729-736.
Patterson A. The Scherrer Formula for X-Ray Particle Size Determination // Physical Review. 1939. Vol. 56. Pp. 978-982.
Henry J., Mohanraj K., Sivakumar G. Photoelectrochemical cell performances of Cu2ZnSnSe4 thin films deposited on various conductive substrates // Vacuum. 2018. Vol. 156. Pp. 172-180.
Keywords:
thin films, aluminum-magnesium spinel, X-ray structural analysis, microstructure, unit cell parameters, rhombic structure.
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